JPH0390428U - - Google Patents
Info
- Publication number
- JPH0390428U JPH0390428U JP15154689U JP15154689U JPH0390428U JP H0390428 U JPH0390428 U JP H0390428U JP 15154689 U JP15154689 U JP 15154689U JP 15154689 U JP15154689 U JP 15154689U JP H0390428 U JPH0390428 U JP H0390428U
- Authority
- JP
- Japan
- Prior art keywords
- alignment marks
- wafer
- exposure apparatus
- photomask
- distances
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15154689U JPH0390428U (en]) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15154689U JPH0390428U (en]) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390428U true JPH0390428U (en]) | 1991-09-13 |
Family
ID=31697841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15154689U Pending JPH0390428U (en]) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390428U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6345818A (ja) * | 1986-08-13 | 1988-02-26 | Nec Corp | 半導体製造装置の位置合わせ方法 |
-
1989
- 1989-12-28 JP JP15154689U patent/JPH0390428U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6345818A (ja) * | 1986-08-13 | 1988-02-26 | Nec Corp | 半導体製造装置の位置合わせ方法 |